| Module Title |
Currently Available |
Under Development |
Equipment
Specification Links |
| NANOSCIENCE TECHNOLOGY |
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| Clean Room Protocols |
X |
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| Nano Fabrication: |
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| Photolithography- |
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| Spin Coating |
X |
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| Mask Alignment/UV Exposure |
X |
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| Chemical Development |
X |
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| Thin-Film Techniques- |
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| Chemical Vapor Deposition (CVD) |
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X |
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| Evaporative Deposition |
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X |
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| Plasma Enhanced CVD |
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X |
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| DC Sputtering |
X |
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| RF Sputtering |
X |
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| Reactive Ion Etching |
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X |
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| Chemical Wet Etching |
X |
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| Characterization methods: |
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| Microscopy (Electron) |
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| Scanning Electron Microscopy |
X |
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| Energy Dispersive X-ray Analyzer (EDS) |
X |
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| Transmission Electron Microscopy (TEM) |
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X |
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| Microscopy (Scanning Probe) |
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| Atomic Force Microscopy (AFM) |
X |
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| Scanning/Tunneling Microscopy (STM) |
X |
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| Microscopy (Light) |
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| Fluorescence |
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X |
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| Con-focal |
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X |
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| Bright Field |
X |
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| Polarizing |
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| Spectroscopy |
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| FT-IR (Infrared) |
X |
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| UV-Vis Diode Array |
X |
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| X-Ray Photoelectron Spectroscopy (XPS) |
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X |
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| Thin Film Analysis |
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| Ellipsometry |
X |
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| Profilometry |
X |
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| NANOSCIENCE TECHNOLOGY |
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X |
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| BIOTECHNOLOGY |
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X |
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| MICROELECTRONICS TECHNOLOGY |
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X |
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| MICROMANUFACTURING TECHNOLOGY |
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X |
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